High Dielectric Constant Materials: VLSI MOSFET Applications

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Springer Science & Business Media, 2005 - 710 pages
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Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

 

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Contents

I
1
IV
2
V
13
VI
21
VII
23
VIII
27
IX
28
X
30
CLV
361
CLVI
362
CLVIII
364
CLIX
367
CLX
368
CLXII
369
CLXIII
370
CLXIV
372

XI
33
XII
34
XIII
35
XIV
36
XV
37
XVII
38
XVIII
39
XIX
40
XX
41
XXIII
42
XXV
43
XXVII
45
XXVIII
46
XXIX
48
XXXI
49
XXXII
51
XXXIII
55
XXXIV
56
XXXV
61
XXXVI
62
XXXVII
65
XXXVIII
68
XXXIX
71
XL
73
XLI
76
XLII
80
XLIII
85
XLIV
86
XLV
91
XLVII
92
XLIX
93
L
96
LI
97
LII
100
LIII
102
LV
105
LVI
107
LVII
108
LVIII
110
LIX
111
LXII
123
LXIV
127
LXVII
130
LXVIII
132
LXIX
133
LXXI
135
LXXII
137
LXXIII
140
LXXIV
143
LXXVI
145
LXXVIII
148
LXXIX
150
LXXX
151
LXXXII
153
LXXXIII
154
LXXXV
155
LXXXVI
161
LXXXVII
163
LXXXIX
165
XCI
169
XCII
176
XCIII
182
XCIV
187
XCV
190
XCVI
192
XCVII
195
XCVIII
197
XCIX
198
C
207
CI
211
CII
212
CIII
218
CIV
219
CV
223
CVI
226
CVII
239
CVIII
247
CIX
248
CX
253
CXI
254
CXII
256
CXIII
257
CXIV
260
CXV
261
CXVII
266
CXVIII
269
CXIX
270
CXX
272
CXXI
275
CXXII
276
CXXIII
277
CXXV
287
CXXVI
290
CXXVII
292
CXXVIII
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CXXIX
297
CXXX
300
CXXXI
303
CXXXII
304
CXXXV
305
CXXXVI
306
CXXXVII
311
CXXXVIII
313
CXXXIX
315
CXL
316
CXLI
319
CXLII
322
CXLIII
327
CXLIV
330
CXLV
333
CXLVII
335
CXLVIII
339
CXLIX
347
CL
348
CLI
353
CLII
355
CLIII
359
CLIV
360
CLXV
374
CLXVI
375
CLXVII
379
CLXVIII
380
CLXIX
381
CLXX
387
CLXXI
391
CLXXIII
392
CLXXV
393
CLXXVII
394
CLXXVIII
395
CLXXIX
396
CLXXXI
397
CLXXXIII
399
CLXXXV
400
CLXXXVI
401
CLXXXVIII
403
CXC
404
CXCIII
405
CXCVI
406
CC
407
CCI
415
CCIII
416
CCIV
418
CCV
419
CCVII
423
CCVIII
425
CCIX
430
CCXI
431
CCXII
432
CCXIII
435
CCXIV
436
CCXVI
438
CCXVIII
440
CCXX
442
CCXXII
444
CCXXIII
445
CCXXVI
446
CCXXVIII
447
CCXXIX
448
CCXXXII
449
CCXXXIII
450
CCXXXIV
457
CCXXXV
461
CCXXXVI
466
CCXXXVII
470
CCXXXVIII
471
CCXXXIX
483
CCXLI
486
CCXLII
487
CCXLIII
500
CCXLIV
501
CCXLV
503
CCXLVI
517
CCXLVII
521
CCXLIX
522
CCL
523
CCLI
524
CCLII
528
CCLIII
531
CCLIV
537
CCLV
544
CCLVI
548
CCLVII
551
CCLIX
553
CCLXI
556
CCLXII
560
CCLXIII
562
CCLXV
567
CCLXVII
568
CCLXIX
574
CCLXX
579
CCLXXII
580
CCLXXIII
583
CCLXXIV
584
CCLXXV
586
CCLXXVI
591
CCLXXVIII
597
CCLXXIX
602
CCLXXXI
603
CCLXXXII
607
CCLXXXIV
610
CCLXXXVI
612
CCLXXXVII
614
CCLXXXVIII
615
CCLXXXIX
616
CCXC
617
CCXCI
619
CCXCIII
625
CCXCIV
628
CCXCVI
629
CCXCVII
630
CCXCVIII
631
CCXCIX
633
CCC
634
CCCI
635
CCCII
639
CCCIV
644
CCCVI
647
CCCVII
648
CCCVIII
649
CCCIX
650
CCCX
653
CCCXI
654
CCCXII
658
CCCXIII
661
CCCXIV
663
CCCXV
664
CCCXVI
667
CCCXVIII
672
CCCXIX
674
CCCXX
681
CCCXXI
688
CCCXXII
692
CCCXXIII
701
CCCXXIV
702
CCCXXV
707
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